Laser-induced Plasma X-ray Source and Its Applications. Development of Laser-plasma Soft X-ray Source for Projection Lithography.
نویسندگان
چکیده
منابع مشابه
Droplet-target laser-plasma source for proximity x-ray lithography
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Projection imaging of 0.1-microm lines and spaces is demonstrated with a Mo/Si multilayer coated Schwarzschild objective and 14-nm illumination from a laser plasma source. This structure has been etched into a silicon wafer by using a trilevel resist and reactive ion etching. Low-contrast modulation at 0.05-microm lines and spaces is observed in polymethylmethacrylate.
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 1999
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.20.173